Flip-chip-integrated silicon nitride ECL at 640nm with relaxed alignment tolerances
Kluge, Ines (Corresponding author); Schulten, Michael; Tabatabaei Mashayekh, Seyed Alireza; Rodrigo, Rebecca; Ackermann, Manuel Franz; Ghannam, Ibrahim Abdel-Aziz Moh'd; Stassen, Andim; Merget, Florian; Leisching, Patrick; Witzens, Jeremy
Bellingham, Washington, USA : SPIE (2022)
Contribution to a book, Contribution to a conference proceedings
In: Silicon Photonics XVII : 22-27 January 2022, San Francisco, California, United States : 20-24 February 2022, online / Graham T. Reed, Andrew P. Knights (editors) ; sponsored and published by: SPIE
Page(s)/Article-Nr.: 9 Seiten
Identifier
- DOI: 10.1117/12.2607615
- DOI: 10.18154/RWTH-2022-02874
- RWTH PUBLICATIONS: RWTH-2022-02874