Hybrid multi-chip assembly of optical communication engines by in situ 3D nano-lithography

Blaicher, Matthias; Billah, Muhammad Rodlin; Kemal, Juned; Hoose, Tobias; Marin-Palomo, Pablo; Hofmann, Andreas; Kutuvantavida, Yasar; Kieninger, Clemens; Dietrich, Philipp-Immanuel; Lauermann, Matthias; Wolf, Stefan; Troppenz, Ute; Moehrle, Martin; Merget, Florian; Skacel, Sebastian; Witzens, Jeremy; Randel, Sebastian; Freude, Wolfgang; Koos, Christian (Corresponding author)

London : Nature Publishing Group (2020)
Journal Article

In: Light : Science & Applications
Volume: 9
Issue: 1
Page(s)/Article-Nr.: 71