Wafer-level testing of optical and optoelectronic chips

This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light from top of the wafer.
L. C. Gunn, R. Malendevich, T. Pinguet, M. Rattier, M. Sussman, J. Witzens, Wafer-Level Testing of Optical and Optoelectronic Chips, US patent filed Apr. 2003.