Demonstration of a low VπL modulator with GHz bandwidth based on electro-optic 
polymer-clad silicon slot waveguides

Scanning electron microscope image of a polymer slot waveguide modulator.

Scanning electron microscope image of a polymer slot waveguide modulator.

Abstract:
We demonstrate a near-infrared electro-optic modulator with a bandwidth of 3 GHz and a VπL figure of merit of 0.8 V-cm using a push-pull configuration. This is the highest operating speed achieved in a silicon-polymer hybrid system to date by several orders of magnitude. The modulator was fabricated from a silicon strip-loaded slot waveguide and clad in a nonlinear polymer. In this geometry, the electrodes form parts of the waveguide, and the modulator driving voltage drops across a 200 nm slot.
R. Ding, T. Baehr-Jones, Y. Liu, R. Bojko, J. Witzens, S. Huang, J. Luo, S. Benight, P. Sullivan, J-M Fedeli, M. Fournier, L. Dalton, A. Jen, and M. Hochberg, Demonstration of a low VπL modulator with GHz bandwidth based on electro-optic 
polymer-clad silicon slot waveguides, Opt. Express 18, 15618-15623 (2010).