Archive for June, 2013

Visible wavelength silicon nitride focusing grating coupler with AlCu/TiN reflector

Abstract: High performance silicon nitride focusing grating couplers with AlCu/TiN reflector for a visible wavelength (660 nm) have been designed and fabricated in a standard complementary metal-oxide-semiconductor (CMOS) pilot line. The influence of the bottom oxide cladding thickness on the

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Silicon nitride back-end optics for biosensor applications

Abstract: Silicon nitride (SiN) is a promising candidate material for becoming a standard high-performance solution for integrated biophotonics applications in the visible spectrum. As a key feature, its compatibility with the complementary-oxidemetal- semiconductor (CMOS) technology permits cost reduction at large

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Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths

Abstract: Silicon nitride is demonstrated as a high performance and cost-effective solution for dense integrated photonic circuits in the visible spectrum. Experimental results for nanophotonic waveguides fabricated in a standard CMOS pilot line with losses below 0.71dB/cm in an aqueous

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“Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths” published in Optics Express

The paper “Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths” by S. Romero et al. is published in Optics Express