Currently browsing: Selected pre-RWTH Patents

Si surface cleaning for semiconductor circuits

  Abstract: A method is disclosed for the cleaning of a Si surface at low temperatures. Oxide on the Si surface is brought into contact with Ge, which then sublimates off the surface. The Ge contamination remaining after the oxide removal is cleared away by an exposure

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INTEGRATED CONTROL SYSTEM FOR LASER AND MACH-ZEHNDER INTERFEROMETER

Abstract: An integrated control system for a laser and Mach-Zehnder interferometer are disclosed and may include configuring a bias point for low-speed control of an optical modulator utilizing control circuitry integrated on the same CMOS die. The optical modulator may

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Design of CMOS integrated germanium photodiodes

Abstract: A CMOS processing compatible germanium on silicon integrated waveguide photodiode. Positioning contacts in predicted low optical field regions, establishing side trenches in the silicon layer along the length of the photodiode reduces optical losses. Novel taper dimensions are selected

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Polarization splitting grating couplers

Abstract: A polarization splitting grating coupler (PSGC) connects an optical signal from an optical element, such as a fiber, to an optoelectronic integrated circuit. The PSGC separates a received optical signal into two orthogonal polarizations and directs the two polarizations

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Wafer-level testing of optical and optoelectronic chips

Abstract: This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light from top of the wafer. L. C. Gunn, R. Malendevich, T. Pinguet, M. Rattier, M. Sussman, J. Witzens, Wafer-Level Testing

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